是利用氦質譜檢漏儀的氦分壓力測量原理，實現被檢件的氦泄漏量測量。當被檢件密封面上存在漏孔時，示漏氣體氦氣及其它成分的氣體均會從漏孔泄出，泄漏出來的氣體進入氦質譜檢漏儀后，由于氦質譜檢漏儀的選擇性識別能力，僅給出氣體中的氦氣分壓力信號值。在獲得氦氣信號值的基礎上，通過標準漏孔比對的方法就可以獲得漏孔對氦泄漏量。根據檢漏過程中的示漏氣體存貯位置與被檢件的關系不同，可以將分為真空法、正壓法、真空壓力法和背壓法，下面分別總結了這四種的檢測原理、優缺點及檢測的標準。

　　真(zhen)(zhen)(zhen)空(kong)(kong)法質譜檢(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)(lou)(lou)(lou)采用(yong)(yong)真(zhen)(zhen)(zhen)空(kong)(kong)法檢(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)(lou)(lou)(lou)時，需(xu)要(yao)(yao)利用(yong)(yong)輔助真(zhen)(zhen)(zhen)空(kong)(kong)泵或(huo)檢(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)(lou)(lou)(lou)儀(yi)對被(bei)檢(jian)(jian)(jian)(jian)產(chan)(chan)品(pin)(pin)內部(bu)(bu)密(mi)封(feng)室抽真(zhen)(zhen)(zhen)空(kong)(kong)，采用(yong)(yong)氦(hai)(hai)罩或(huo)噴吹(chui)的(de)(de)方法在(zai)被(bei)檢(jian)(jian)(jian)(jian)產(chan)(chan)品(pin)(pin)外(wai)表(biao)面(mian)施(shi)氦(hai)(hai)氣(qi)，當被(bei)檢(jian)(jian)(jian)(jian)產(chan)(chan)品(pin)(pin)表(biao)面(mian)有(you)漏(lou)(lou)(lou)(lou)(lou)(lou)孔(kong)時，氦(hai)(hai)氣(qi)就會通過漏(lou)(lou)(lou)(lou)(lou)(lou)孔(kong)進入(ru)(ru)被(bei)檢(jian)(jian)(jian)(jian)產(chan)(chan)品(pin)(pin)內部(bu)(bu)，再進入(ru)(ru)氦(hai)(hai)質譜檢(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)(lou)(lou)(lou)儀(yi)，從(cong)而(er)實(shi)現(xian)(xian)被(bei)檢(jian)(jian)(jian)(jian)產(chan)(chan)品(pin)(pin)泄漏(lou)(lou)(lou)(lou)(lou)(lou)量測(ce)(ce)(ce)量。按照施(shi)漏(lou)(lou)(lou)(lou)(lou)(lou)氣(qi)體方法的(de)(de)不同，又可(ke)以(yi)將真(zhen)(zhen)(zhen)空(kong)(kong)法分(fen)為真(zhen)(zhen)(zhen)空(kong)(kong)噴吹(chui)法和真(zhen)(zhen)(zhen)空(kong)(kong)氦(hai)(hai)罩法。其中真(zhen)(zhen)(zhen)空(kong)(kong)噴吹(chui)法：采用(yong)(yong)噴槍的(de)(de)方式向被(bei)檢(jian)(jian)(jian)(jian)產(chan)(chan)品(pin)(pin)外(wai)表(biao)面(mian)噴吹(chui)氦(hai)(hai)氣(qi)，可(ke)以(yi)實(shi)現(xian)(xian)漏(lou)(lou)(lou)(lou)(lou)(lou)孔(kong)的(de)(de)精確定(ding)(ding)位(wei);真(zhen)(zhen)(zhen)空(kong)(kong)氦(hai)(hai)罩法：采用(yong)(yong)有(you)一定(ding)(ding)密(mi)閉功能(neng)(neng)(neng)(neng)的(de)(de)氦(hai)(hai)罩將被(bei)檢(jian)(jian)(jian)(jian)產(chan)(chan)品(pin)(pin)全部(bu)(bu)罩起來，在(zai)罩內充(chong)滿一定(ding)(ding)濃度的(de)(de)氦(hai)(hai)氣(qi)，可(ke)以(yi)實(shi)現(xian)(xian)被(bei)檢(jian)(jian)(jian)(jian)產(chan)(chan)品(pin)(pin)總漏(lou)(lou)(lou)(lou)(lou)(lou)率的(de)(de)測(ce)(ce)(ce)量。真(zhen)(zhen)(zhen)空(kong)(kong)法的(de)(de)優(you)點與缺點真(zhen)(zhen)(zhen)空(kong)(kong)法的(de)(de)優(you)點是檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)靈(ling)敏度高match，可(ke)以(yi)精確定(ding)(ding)位(wei)，能(neng)(neng)(neng)(neng)實(shi)現(xian)(xian)大容(rong)器或(huo)復雜(za)結構產(chan)(chan)品(pin)(pin)的(de)(de)檢(jian)(jian)(jian)(jian)漏(lou)(lou)(lou)(lou)(lou)(lou)。真(zhen)(zhen)(zhen)空(kong)(kong)法的(de)(de)缺點是只能(neng)(neng)(neng)(neng)實(shi)現(xian)(xian)一個大match氣(qi)壓差的(de)(de)漏(lou)(lou)(lou)(lou)(lou)(lou)率檢(jian)(jian)(jian)(jian)測(ce)(ce)(ce)，不能(neng)(neng)(neng)(neng)準確反映帶壓被(bei)檢(jian)(jian)(jian)(jian)產(chan)(chan)品(pin)(pin)的(de)(de)真(zhen)(zhen)(zhen)實(shi)泄漏(lou)(lou)(lou)(lou)(lou)(lou)狀態。真(zhen)(zhen)(zhen)空(kong)(kong)法主要(yao)(yao)應用(yong)(yong)于真(zhen)(zhen)(zhen)空(kong)(kong)密(mi)封(feng)性能(neng)(neng)(neng)(neng)要(yao)(yao)求，但不帶壓工作的(de)(de)產(chan)(chan)品(pin)(pin)，如空(kong)(kong)間活動部(bu)(bu)件、液(ye)氫槽車、環境模擬設備(bei)等。

　　正壓(ya)法(fa)(fa)(fa)(fa)(fa)氦(hai)質(zhi)譜檢(jian)漏(lou)(lou)(lou)(lou)(lou)采(cai)用正壓(ya)法(fa)(fa)(fa)(fa)(fa)檢(jian)漏(lou)(lou)(lou)(lou)(lou)時，需對(dui)被(bei)檢(jian)產(chan)(chan)品(pin)(pin)內部(bu)密封室(shi)充入高于(yu)一個大氣(qi)(qi)壓(ya)力的(de)(de)氦(hai)氣(qi)(qi)，當被(bei)檢(jian)產(chan)(chan)品(pin)(pin)表(biao)面有(you)漏(lou)(lou)(lou)(lou)(lou)孔時，氦(hai)氣(qi)(qi)就會通孔漏(lou)(lou)(lou)(lou)(lou)孔進入被(bei)檢(jian)外(wai)表(biao)面的(de)(de)周圍(wei)(wei)大氣(qi)(qi)環(huan)境中，再采(cai)用吸槍(qiang)的(de)(de)方(fang)式(shi)檢(jian)測(ce)(ce)被(bei)檢(jian)產(chan)(chan)品(pin)(pin)周圍(wei)(wei)大氣(qi)(qi)環(huan)境中的(de)(de)氦(hai)氣(qi)(qi)濃(nong)度增量(liang)(liang)(liang)，從(cong)而(er)實現被(bei)檢(jian)產(chan)(chan)品(pin)(pin)泄漏(lou)(lou)(lou)(lou)(lou)測(ce)(ce)量(liang)(liang)(liang)。按照收集氦(hai)氣(qi)(qi)方(fang)式(shi)的(de)(de)不同，又可(ke)以將正壓(ya)法(fa)(fa)(fa)(fa)(fa)分為正壓(ya)吸槍(qiang)法(fa)(fa)(fa)(fa)(fa)和正壓(ya)累(lei)(lei)積法(fa)(fa)(fa)(fa)(fa)。其(qi)中正壓(ya)吸槍(qiang)法(fa)(fa)(fa)(fa)(fa)：采(cai)用檢(jian)漏(lou)(lou)(lou)(lou)(lou)儀吸槍(qiang)對(dui)被(bei)檢(jian)產(chan)(chan)品(pin)(pin)外(wai)表(biao)面進行掃描探查，可(ke)以實現漏(lou)(lou)(lou)(lou)(lou)孔的(de)(de)精確定位;正壓(ya)累(lei)(lei)積法(fa)(fa)(fa)(fa)(fa)：采(cai)用有(you)一定密閉功能的(de)(de)氦(hai)罩將被(bei)檢(jian)產(chan)(chan)品(pin)(pin)全部(bu)罩起來，采(cai)用檢(jian)漏(lou)(lou)(lou)(lou)(lou)儀吸槍(qiang)測(ce)(ce)量(liang)(liang)(liang)一定時間段前后的(de)(de)氦(hai)罩內氦(hai)氣(qi)(qi)濃(nong)度變化量(liang)(liang)(liang)，實現被(bei)檢(jian)產(chan)(chan)品(pin)(pin)總(zong)漏(lou)(lou)(lou)(lou)(lou)率的(de)(de)精確測(ce)(ce)量(liang)(liang)(liang)。

　　正(zheng)壓法(fa)的(de)優點與缺點正(zheng)壓法(fa)的(de)優點是(shi)不(bu)需要(yao)輔助的(de)真空系統，可以精(jing)確定位，實(shi)現任何工作(zuo)壓力下的(de)檢(jian)測(ce)。正(zheng)壓法(fa)的(de)缺點是(shi)檢(jian)測(ce)靈(ling)敏度(du)(du)較(jiao)低，檢(jian)測(ce)結果不(bu)確定度(du)(du)大(da)，受(shou)測(ce)量環境條件影(ying)響大(da)。正(zheng)壓法(fa)主要(yao)應用于(yu)大(da)容(rong)積高壓密閉容(rong)器產品的(de)檢(jian)漏，如(ru)高壓氦氣瓶、艙門檢(jian)漏儀等。

　　真空壓力法氦質譜檢漏真空壓力法檢漏時，需(xu)要(yao)將被檢(jian)(jian)(jian)產(chan)品整體放(fang)入(ru)真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)密(mi)(mi)(mi)(mi)封室內，真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)密(mi)(mi)(mi)(mi)封室與(yu)輔(fu)助抽空(kong)(kong)系(xi)統(tong)和檢(jian)(jian)(jian)漏(lou)(lou)儀相(xiang)連，被檢(jian)(jian)(jian)產(chan)品的充(chong)氣(qi)接(jie)口通過連接(jie)管(guan)道(dao)(dao)引出真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)密(mi)(mi)(mi)(mi)封室后，再與(yu)氦氣(qi)源相(xiang)連，當被檢(jian)(jian)(jian)產(chan)品表面有漏(lou)(lou)孔(kong)時，氦氣(qi)就(jiu)會通過漏(lou)(lou)孔(kong)進(jin)入(ru)真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)密(mi)(mi)(mi)(mi)封室，再進(jin)入(ru)氦質(zhi)譜檢(jian)(jian)(jian)漏(lou)(lou)儀，從而實(shi)現被檢(jian)(jian)(jian)產(chan)品總漏(lou)(lou)率的測(ce)量。真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)壓(ya)(ya)(ya)力(li)法(fa)(fa)的優點(dian)與(yu)缺(que)(que)點(dian)真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)壓(ya)(ya)(ya)力(li)法(fa)(fa)的優點(dian)是檢(jian)(jian)(jian)測(ce)靈敏度高，能實(shi)現任何工(gong)作(zuo)壓(ya)(ya)(ya)力(li)的漏(lou)(lou)率檢(jian)(jian)(jian)測(ce)，反(fan)映被檢(jian)(jian)(jian)件的真(zhen)(zhen)(zhen)(zhen)(zhen)實(shi)泄漏(lou)(lou)狀態。真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)壓(ya)(ya)(ya)力(li)法(fa)(fa)的缺(que)(que)點(dian)是檢(jian)(jian)(jian)漏(lou)(lou)系(xi)統(tong)復雜，需(xu)要(yao)根據被檢(jian)(jian)(jian)產(chan)品的容(rong)積和形狀設計(ji)真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)密(mi)(mi)(mi)(mi)封室。這里需(xu)要(yao)說明(ming)在(zai)(zai)檢(jian)(jian)(jian)漏(lou)(lou)過程要(yao)求確保充(chong)氣(qi)管(guan)道(dao)(dao)接(jie)口無泄漏(lou)(lou)，或者采取(qu)結構(gou)(gou)設計(ji)將充(chong)氣(qi)管(guan)道(dao)(dao)連接(jie)接(jie)口放(fang)置在(zai)(zai)真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)密(mi)(mi)(mi)(mi)封室外部。真(zhen)(zhen)(zhen)(zhen)(zhen)空(kong)(kong)壓(ya)(ya)(ya)力(li)法(fa)(fa)主要(yao)應用(yong)于結構(gou)(gou)簡單、壓(ya)(ya)(ya)力(li)不是特(te)別高的密(mi)(mi)(mi)(mi)封產(chan)品，如電磁閥、高壓(ya)(ya)(ya)充(chong)氣(qi)管(guan)道(dao)(dao)、推進(jin)劑貯箱、天(tian)線、應答機、整星產(chan)品等。

　　背壓法氦質譜檢漏采用背壓法檢漏時，將(jiang)被(bei)檢(jian)(jian)(jian)產(chan)品(pin)置于高壓(ya)(ya)的(de)(de)(de)(de)氦氣室中，浸泡數(shu)(shu)小(xiao)時或(huo)數(shu)(shu)天(tian)，如果被(bei)檢(jian)(jian)(jian)產(chan)品(pin)表面有(you)漏(lou)(lou)孔，氦氣便通過漏(lou)(lou)孔壓(ya)(ya)入被(bei)檢(jian)(jian)(jian)產(chan)品(pin)內部密(mi)封(feng)(feng)腔(qiang)(qiang)中，使內部密(mi)封(feng)(feng)腔(qiang)(qiang)中氦分壓(ya)(ya)力上升。然后(hou)取出被(bei)檢(jian)(jian)(jian)產(chan)品(pin)，將(jiang)表面的(de)(de)(de)(de)殘余氦氣吹除后(hou)再將(jiang)被(bei)檢(jian)(jian)(jian)產(chan)品(pin)放入與檢(jian)(jian)(jian)漏(lou)(lou)儀相(xiang)連的(de)(de)(de)(de)真(zhen)空(kong)容(rong)(rong)器(qi)內，被(bei)檢(jian)(jian)(jian)產(chan)品(pin)內部密(mi)封(feng)(feng)腔(qiang)(qiang)內的(de)(de)(de)(de)氦氣會通過漏(lou)(lou)孔泄漏(lou)(lou)到真(zhen)空(kong)容(rong)(rong)器(qi)，再進(jin)入氦質譜檢(jian)(jian)(jian)漏(lou)(lou)儀，從而(er)實現被(bei)檢(jian)(jian)(jian)產(chan)品(pin)總漏(lou)(lou)率(lv)(lv)測(ce)(ce)量(liang)。檢(jian)(jian)(jian)漏(lou)(lou)儀給出的(de)(de)(de)(de)漏(lou)(lou)率(lv)(lv)值為測(ce)(ce)量(liang)漏(lou)(lou)率(lv)(lv)，需(xu)要(yao)通過換算(suan)公式計(ji)算(suan)出被(bei)檢(jian)(jian)(jian)產(chan)品(pin)的(de)(de)(de)(de)等效標準(zhun)漏(lou)(lou)率(lv)(lv)。背(bei)壓(ya)(ya)法(fa)(fa)的(de)(de)(de)(de)優點(dian)與缺點(dian)背(bei)壓(ya)(ya)法(fa)(fa)的(de)(de)(de)(de)優點(dian)是(shi)檢(jian)(jian)(jian)測(ce)(ce)靈敏度高，能實現小(xiao)型密(mi)封(feng)(feng)容(rong)(rong)器(qi)產(chan)品(pin)的(de)(de)(de)(de)泄漏(lou)(lou)檢(jian)(jian)(jian)測(ce)(ce)，可以進(jin)行(xing)批量(liang)化檢(jian)(jian)(jian)測(ce)(ce)。背(bei)壓(ya)(ya)法(fa)(fa)的(de)(de)(de)(de)缺點(dian)是(shi)不能進(jin)行(xing)大型密(mi)封(feng)(feng)容(rong)(rong)器(qi)的(de)(de)(de)(de)漏(lou)(lou)，否(fou)則由于密(mi)封(feng)(feng)腔(qiang)(qiang)體容(rong)(rong)積太(tai)大，導(dao)致加壓(ya)(ya)時間太(tai)長。此外，每個(ge)測(ce)(ce)量(liang)漏(lou)(lou)率(lv)(lv)都對應兩個(ge)等效標準(zhun)漏(lou)(lou)率(lv)(lv)，在細檢(jian)(jian)(jian)完成后(hou)還需(xu)要(yao)采用(yong)(yong)其它方(fang)法(fa)(fa)進(jin)行(xing)粗檢(jian)(jian)(jian)，排除大漏(lou)(lou)的(de)(de)(de)(de)可能。背(bei)壓(ya)(ya)法(fa)(fa)主要(yao)應用(yong)(yong)于各(ge)種電(dian)子元器(qi)件產(chan)品(pin)檢(jian)(jian)(jian)漏(lou)(lou)。